Maintenance Planning for Equipment Built Around a Wafer Heater

https://precision-heat-works.opalvector.com/posts/why-thermal-uniformity-matters-in-semiconductor-heater-design

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result